Laser Slicing of Large-Area Diamond Substrates
semiconductor-digest.com Nov 2, 2026

Laser Slicing of Large-Area Diamond Substrates

AI-summarised brief · reviewed before publication

Researchers at Chiba University have demonstrated a laser‑based method for slicing diamond substrates. The team compared one high‑pressure high‑temperature (HPHT) diamond and two chemical vapor deposition (CVD) diamonds with varying nitrogen levels, exposing them to ultrashort laser pulses from 233 fs to 30 ps. CVD samples responded to shorter pulses, producing either isolated marks or continuous modified zones, while the HPHT crystal required longer pulses and showed more stable modifications. Using 10 ps pulses, the authors created a grid of modifications in an 8 mm × 8 mm CVD diamond and, after steps, split the wafer along the {100} plane. The slice is 710 times larger than the 300 µm‑square HPHT piece previously achieved, marking a step toward industrial‑scale diamond substrates for optics, heat spreaders and power electronics.