Unlocking Scalable SRG Waveguides for Mass-Market AR/MR Displays
semiconductor-digest.com Jun 16, 2026

Unlocking Scalable SRG Waveguides for Mass-Market AR/MR Displays

AI-summarised brief · reviewed before publication

Alex Hong, a senior field application engineer at Onto Innovation, has developed an integrated process control solution for manufacturing surface relief grating (SRG) waveguides used in augmented reality (AR) and mixed reality (MR) displays. The solution combines optical critical dimension metrology, picosecond ultrasonic metal film thickness measurement, image-based overlay, and automated defect inspection to meet sub-100nm alignment tolerances and control grating depth, slanted angle, and film thickness uniformity. This enables stable high-volume manufacturing of SRG waveguides with precise control over diffraction efficiency, color uniformity, and field of view.

💡 Why It Matters

  • · The breakthrough in SRG waveguide manufacturing has significant implications for the adoption of AR/MR displays in mass-market applications.
  • · With the ability to meet OEM schedules, cost models, and yield expectations simultaneously, manufacturers can now focus on scaling production to meet growing demand, ultimately driving the widespread adoption of AR/MR technology in consumer electronics and other industries.