Xanadu and Mitsubishi Chemical Advance Quantum Computing Work on EUV Lithography
thequantuminsider.com Aug 25, 2026

Xanadu and Mitsubishi Chemical Advance Quantum Computing Work on EUV Lithography

AI-summarised brief · reviewed before publication

Xanadu Quantum Technologies and Mitsubishi Chemical have entered the second phase of a joint project to apply photonic quantum computing to extreme ultraviolet (EUV) lithography, a key step in semiconductor fabrication. Building on earlier work that proved quantum algorithms could model the optical behavior of EUV photoresists, the new phase will feed parameters from Xanadu’s simulations into Mitsubishi’s multi‑scale models to predict radiation‑induced blur, a quantum‑level defect that limits pattern fidelity. The collaboration is funded by Canada’s NRC Industrial Research Assistance Program and Japan’s Strategic Innovation Promotion Program, with involvement from AIST and the G‑QuAT centre. The goal is a fault‑tolerant‑quantum‑computing‑ready software pipeline that can identify blur‑reducing materials and accelerate next‑generation chip production for global technology leaders worldwide today across.

💡 Why It Matters

  • · By tackling EUV blur with quantum‑derived material insights, the partnership could shave critical nanometers off chip features, giving manufacturers a tangible performance edge.