Bruker Invests in Photothermal AFM-IR to Advance Semiconductor Research
AI-summarised brief · reviewed before publication
Bruker Corporation has accelerated development of its photothermal AFM-IR spectroscopy capabilities to address semiconductor research challenges. The company is expanding AFM-IR use beyond contamination analysis into next-generation semiconductor technologies, including EUV photoresist patterning and advanced materials for transistor scaling. A Joint Development Project with imec will assess the utility of photothermal AFM-IR for addressing critical research questions, leveraging the Dimension IconIR system's nanoscale chemical characterization capabilities.