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The Next Level of Efficiency in Chip Manufacturing Is Taking Shape Below the Cleanroom
At SEMICON Europa, DAS Environmental Experts introduced Subfab NetZero, an integrated platform linking waste‑gas abatement, emissions measurement, digital connectivity, and intelligent control for semiconductor subfab operations. The concept incorporates the new ALCEA NOx abatement system, enabling continuous capture of emissions and operating states to drive demand‑based equipment control. By aligning vacuum pumps, gas treatment units, and other sub‑cleanroom equipment, the approach aims to reduce energy, water, and chemical use while tightening emissions reporting. Early adopters in the industry are [...]