Enabling Next-Generation Plasma Dicing with Ultrasonic Spray Coating and Digital Lithography
semiconductor-digest.com Oct 28, 2026

Enabling Next-Generation Plasma Dicing with Ultrasonic Spray Coating and Digital Lithography

AI-summarised brief · reviewed before publication

EV Group researchers demonstrated that ultrasonic spray coating can apply a conformal, photo‑sensitive resist over complex bump, pillar, and cavity topographies on 200 mm and 300 mm wafers. Combined with EVG’s LITHOSCALE maskless digital lithography, the process yields narrow dicing streets (as small as 5 µm) with steep sidewalls and clean edges, eliminating the laser step required by water‑soluble coatings. The technique reduces mechanical stress, avoids contamination from film frames and tape, and scales to thinner dies and finer pitches.

💡 Why It Matters

  • · By removing the need for laser exposure and film‑frame handling, the method streamlines plasma dicing for advanced packaging, enabling higher throughput and lower defect rates in next‑generation semiconductor devices.