Festo VTOC Valve Terminal Enhances Valve Control in Semiconductor Fabrication
semiconductor-digest.com Jun 3, 2026

Festo VTOC Valve Terminal Enhances Valve Control in Semiconductor Fabrication

AI-summarised brief · reviewed before publication

Festo has introduced the VTOC valve terminal, designed for high-density semiconductor applications. The VTOC features 48 valve stations, twice the standard capacity, within a compact footprint unit. Each valve slice controls two processes, enabling up to 96 process control points per unit. The terminal uses swappable interface modules to support various control environments and features a modular design for fast maintenance and replacement of individual valves. The VTOC delivers a long service life and promotes efficiency through consistency and familiarity with a standard component.

💡 Why It Matters

  • · The VTOC's compact design and high capacity will reduce the need for multiple units, saving semiconductor manufacturers space, wiring complexity, and system cost.
  • · By promoting consistency and familiarity with a standard component, Festo's VTOC terminal will also reduce engineering overhead and inventory.