Qnity Develops 330°C Sealing Material for High-Temperature Chipmaking Processes
AI-summarised brief · reviewed before publication
Qnity Electronics introduced Kalrez 7080, a perfluoroelastomer seal that withstands temperatures up to 330 °C, targeting high‑temperature semiconductor processes such as diffusion, oxidation, ALD, CVD, and LPCVD. The part offers ultra‑low outgassing and minimal metallic contamination, proven by 672‑hour thermal‑aging tests at 325 °C. Qnity will showcase the new seal alongside other Kalrez products—9400, PF3, and UPHT—at SEMICON West (Oct. 13‑15) in San Francisco, aiming to improve yield, reliability, and process stability.
💡 Why It Matters
- · The new seal expands the thermal envelope for critical fabrication steps, enabling tighter control of high‑temperature processes that drive next‑generation device performance.
- · It also reduces contamination and maintenance downtime, directly boosting manufacturing efficiency.