Advanced Energy Launches Temperature Measurement System for Semiconductor Processing
AI-summarised brief · reviewed before publication
Advanced Energy Industries unveiled the Centra Smart Hub at SEMICON West, pairing it with Remote Smart Sensors to deliver precise wafer-temperature measurement for lamp-heated silicon and silicon carbide processes. The system offers up to 40% greater accuracy at 3.3 µm or 5.2 µm wavelengths, reaching temperatures up to 1700 °C. Designed for rapid thermal annealing and epitaxial growth, it integrates ECAT and Ethernet protocols for seamless system compatibility. The technology promises higher throughput, uniformity, and yield in semiconductor fabs.
💡 Why It Matters
- · By overcoming infrared lamp interference that hampers conventional pyrometers, the new platform enables reliable temperature control in high‑temperature processes, directly boosting production efficiency and product quality.