Wooptix Brings Astronomy Optics to Wafer Metrology
AI-summarised brief · reviewed before publication
Spanish firm Wooptix has introduced the Phemet system, applying wavefront phase imaging—originally used in astronomy—to semiconductor wafer metrology. The device captures an entire wafer in a single snapshot, generating about 16 million data points that reveal nanometer‑scale height maps, stress, and in‑plane distortion. By holding wafers vertically, the system eliminates gravity‑induced deformation, enabling predictive modeling of wafer behavior during lithography and deposition. Wooptix aims to deploy one tool per process step, potentially covering every wafer in advanced logic fabs.
💡 Why It Matters
- · Phemet’s single‑shot, high‑resolution mapping could replace multiple offline metrology tools, reducing cycle time and improving process predictability in high‑volume fabs.