From Lab to Fab: The Rise of HiPIMS in Semiconductor Manufacturing
AI-summarised brief · reviewed before publication
High‑power impulse magnetron sputtering (HiPIMS) is being transitioned from laboratory research to high‑volume semiconductor fab lines, according to a VON ARDENNE technical paper. The authors detail the engineering upgrades required to scale the process to 200 mm‑plus wafers, emphasizing real‑time voltage‑current pulse monitoring, low‑inductance feed lines, programmable pulse shaping, rapid arc suppression and advanced target cooling. Synchronized substrate biasing is highlighted as a means to accelerate ions during peak flux, yielding denser, better‑adhering films with superior step coverage. A key use case is through‑glass via (TGV) metallization for advanced packaging, where HiPIMS enables partially ion‑controlled deposition of titanium adhesion layers and copper seed films. The paper proposes a two‑ to four‑year roadmap from pilot retrofits to validated production, treating scale‑up as a comprehensive system‑engineering effort.
💡 Why It Matters
- · By turning sputtering into a controllable ion‑driven process, HiPIMS can unlock tighter device geometries and more reliable interconnects in next‑generation packaging.