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Gigaphoton Takes Its Lightsources Beyond the Scanner
Gigaphoton, a Komatsu subsidiary that has supplied over 2,500 KrF and ArF excimer lasers to DUV scanners for 26 years, announced at SEMICON West that it is expanding beyond lithography into four new fab applications. The company unveiled the G300K, a 248 nm KrF laser delivering 300 W at up to 4 kHz, designed for ultra‑fine ablation of advanced‑packaging substrates. Using mask‑projection optics, the system can drill multiple vias simultaneously, achieving diameters as small as 3 µm with near‑vertical sidewalls and minimal [...]